Low temperature plasma · Classic barrel shape.

PR500： Manual control PR510: automatic touch screen control
Inner groove
Silicon wafer ashing state
The classic model of low-temperature plasma is very historic. Adopting automatic coordination function and touch screen operation (PR510), it improves operability and safety, and is a small and compact plasma processing equipment.

● Remove photoresist
● Component cleaning
● Interface activation treatment
● Micro grinding
Silicon wafer, corresponding to glass substrate

purpose
Large diameter (Φ 215mm) quartz reaction chamber
● Small integrated design

Specifications: